With the steam
age came the demand for pressure measuring instruments. Bourdon
tubes or bellows, where mechanical displacements were transferred
to an indicating pointer were the first pressure instruments,
and are still in use today.
Pressure metrology
is the technology of transducing pressure into an electrical
quantity. Normally, a diaphragm construction is used with strain
gauges either bonded to , or diffused into it, acting as resistive
elements. Under the pressure-induced strain, the resistive values
change.
In capacitive
technology, the pressure diaphragm is one plate of a capacitor
that changes its value under pressure-induced displacement.

Pressure
sensing using diaphragm technology measures the difference in
pressure of the two sides of the diaphragm.
Depending upon
the relevant pressure, we use the terms ABSOLUTE, where the reference
is vacuum (1st picture), GAUGE, where the reference is atmospheric
pressure (2nd picture), or DIFFERENTIAL, where the sensor has
two ports for the measure of two different pressure.

The piezoresistive
pressure sensor, or silicon cell.

This type of pressure sensor consists of a micro-machined silicon
diaphragm with piezoresistive strain gauges diffused into it,
fused to a silicon or glass backplate.
The resistors
have a value of approx. 3.5 kOhm. Pressure-induced strain increases
the value of the radial resistors (r), and decreases the value
of the resistors (t) transverse to the radius. This resistance
change can be high as 30%.
The resistors
are connected as a Wheatstone Bridge, the output of which is
directly proportional to the pressure.

Whetstone
Bridge Circuit

Leadouts
from the bridge.

1). Gold
or aluminium wires are welded to the aluminium contacts on the
chip and to the glass feed-through, pins of the header.
2). TAB (Tape
Automated Bonding). The contacts on the chip have a gold dot.
A pretinned
felxible printed circuit is directly soldered to these gold dots
and the other end to a PC-board, or the header.
In the first
method, the sensor must be fixed on the header. The TAB printed
circuit, however, holds the sensor in place itself.
Low cost
sensors.

Low cost
sensors are devices where the they are exposed to the media without
protection.
The glass feed-through
and the silicon cell is mounted in a plastic housing with pressure
ports for positive and negative pressure. (1st picture)
The silicon
sensor with the TAB print is fixed between two plastic mouldings
with pressure ports. (2nd picture)
The silicon
sensor is bonded to a brass pressure port. The contacts are made
either by gold wires to soldering pins, or by TAB flexible printed
circuit.

(3rd picture)
Piezoresistive
OEM Pressure Transducer.

The silicon
sensor on the glass feed-through is mounted ina stainless steel
housing, isolated by a thin stainless steel diaphragm and filled
with silcone oil. The pressure acts on the diaphragm and is transfered
through the oil onto the sensor. These transducers are fully
tested for temperature and linearity and the compensation resistor
values given on the individual test sheets.
Low cost
Pressure Transducers.

Nickel
diaphragms in brass housings brazed under high temperature or
brazed steel diaphragms in steel housings allow the fabrication
of isolated pressure sensors with low production costs, without
substantially limiting the area of application.

Pressure
Transducers.

Pressure
transducers are pressure measuring instruments, ready to use.
It is an OEM transducer with pressure port, integrated compensation
resistors and a cable or connector.
Transducers
give an unamplified signal into a separate instrumentation amplifier
or indicator. They can be considered as passive bridges, being
interchangeable between different manufacturers.
Pressure
Transmitters.

In pressure
transmitters, the full signal conditioning circuitry is integrated
in the housing. The sensor signal is conditioned into standard
output signals of 0...100mV, 0...10V, 0.5...4.5V, & 4-20mA.
Normally, the
signal is independent from the excitation (i.e. 8...28V), but
in ratiometric transmitters, the signal is proportional to the
excitation.
The accuracy
of a transmitter is best described by an error band.
This band covers
all errors over the full pressure and temperature range. Typical
errors are also given. The typical error describes the accuracy
which can normally be expected in a measurement.

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